Pūoko pehanga miihini 2CP3-68 1946725 mo Carter excavator

He tikanga mo te whakarite i te pukoro pehanga, e tohuhia ana ko nga waahanga e whai ake nei:

S1, whakarato i te angiangi me te mata o muri me te mata o mua; Te hanga i te riipene piezoresistive me te waahi whakapiri kaha ki te mata o mua o te angiangi; Te hanga i te kohao hohonu pehanga ma te tarai i te mata o muri o te angiangi;

S2, te hono i te pepa tautoko ki muri o te angiangi;

S3, hanga kohao mata me nga waea whakarewa ki te taha o mua o te angiangi, me te hono i nga takai piezoresistive hei hanga piriti Wheatstone;

S4, whakatakoto me te hanga i te paparanga passivation i runga i te mata mua o te angiangi, me te whakatuwhera wahi o te apa passivation ki te hanga i te rohe papa whakarewa. 2. Ko te tikanga hanga o te pukoro pehanga e ai ki te kereme 1, kei roto i a S1 nga waahanga e whai ake nei: S11: te whakarato i te angiangi me te mata o muri me te mata o mua, me te tautuhi i te matotoru o te kiriata tairongo pehanga i runga i te angiangi; S12: ka whakamahia te whakaurunga katote ki te mata o mua o te angiangi, ka hangaia nga takai piezoresistive e te tikanga whakamaaramatanga teitei-te wera, me nga rohe whakapiri he tino doped; S13: te whakatakoto me te hanga paparanga whakamarumaru ki te mata o mua o te angiangi; S14: te tarai me te hanga i te kohao hohonu ki te tuara o te angiangi hei hanga kiriata tairongo pehanga. 3. Ko te tikanga hanga o te pukoro pehanga e ai ki te kerēme 1, ko te mea angiangi ko SOI.

I te tau 1962, ko Tufte et al. i hangaia he pūoko pehanga piezoresistive me nga takai piezoresistive silicon diffused me te hanganga kiriata silicon mo te wa tuatahi, a ka timata te rangahau mo te puoko pehanga piezoresistive. I te mutunga o te 1960s me te timatanga o te 1970s, ko te ahua o nga hangarau e toru, ara, te hangarau o te hiako anisotropic etching, te hangarau whakauru katote me te hangarau honohono anodic, i puta nga huringa nui ki te pukoro pehanga, i whai waahi nui ki te whakapai ake i te mahi o te pukoro pehanga. . Mai i nga tau 1980, me te whanaketanga atu o te hangarau micromachining, penei i te anisotropic etching, lithography, diffusion doping, implantation katote, hononga me te paninga, kua heke tonu te rahi o te pukoro pehanga, kua pai ake te maarama, a he tiketike te putanga. he rawe te mahi. I te wa ano, te whanaketanga me te tono o te hangarau micromachining hou hanga te matotoru kiriata o te pēhanga pūoko tika te whakahaere.